A Study on the Emissions of Acid Gas, Acid Aerosols and Chlorine from the Burning of Trichlorosilane

Research output: Contribution to journal › Article › peer-review

Abstract

Work published in Journal of Occupational Safety and Health.

Original language	American English
Journal	Journal of Occupational Safety and Health
Volume	20
State	Published - 2012

@article{762e50e9f3f248beb5ec0a84a284de3f,

title = "A Study on the Emissions of Acid Gas, Acid Aerosols and Chlorine from the Burning of Trichlorosilane",

abstract = " Work published in Journal of Occupational Safety and Health.",

author = "Jhy-Charm Soo and Siou-Rong Li and Jenq-Renn Chen and Cheng-Ping Chang and Yu-Fang Ho and Trong-Neng Wu and Perng-Jy Tsai",

year = "2012",

language = "American English",

volume = "20",

journal = "Journal of Occupational Safety and Health",

}

TY - JOUR

T1 - A Study on the Emissions of Acid Gas, Acid Aerosols and Chlorine from the Burning of Trichlorosilane

AU - Soo, Jhy-Charm

AU - Li, Siou-Rong

AU - Chen, Jenq-Renn

AU - Chang, Cheng-Ping

AU - Ho, Yu-Fang

AU - Wu, Trong-Neng

AU - Tsai, Perng-Jy

PY - 2012

Y1 - 2012

N2 - Work published in Journal of Occupational Safety and Health.

AB - Work published in Journal of Occupational Safety and Health.

M3 - Article

VL - 20

JO - Journal of Occupational Safety and Health

JF - Journal of Occupational Safety and Health

ER -