Behavior of TiO 2 thin film in a nanocapacitor

Dongdong Jia, C. Shaffer, S. Pickering, A. Goonewardene, Xiao Jun Wang

Research output: Contribution to journalArticlepeer-review

2 Scopus citations

Abstract

Gold and platinum nanocapacitors have been fabricated using a magnetron sputtering technique. TiO 2 is used as a dielectric material to separate the metal layers which act as the parallel plates for the capacitors. The thickness for metal films and TiO 2 layer is 80 nm and 400 nm, respectively. Capacitance of the nanocapacitors has been measured and dielectric constant of TiO 2 calculated. Both capacitance and dielectric constant are observed to have strong frequency dependence.

Original languageEnglish
Pages (from-to)1234-1237
Number of pages4
JournalJournal of Nanoscience and Nanotechnology
Volume8
Issue number3
DOIs
StatePublished - Mar 2008

Keywords

  • Nanocapacitor
  • Sol-gel
  • TiO

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