Abstract
Gold and platinum nanocapacitors have been fabricated using a magnetron sputtering technique. TiO 2 is used as a dielectric material to separate the metal layers which act as the parallel plates for the capacitors. The thickness for metal films and TiO 2 layer is 80 nm and 400 nm, respectively. Capacitance of the nanocapacitors has been measured and dielectric constant of TiO 2 calculated. Both capacitance and dielectric constant are observed to have strong frequency dependence.
Original language | English |
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Pages (from-to) | 1234-1237 |
Number of pages | 4 |
Journal | Journal of Nanoscience and Nanotechnology |
Volume | 8 |
Issue number | 3 |
DOIs | |
State | Published - Mar 2008 |
Keywords
- Nanocapacitor
- Sol-gel
- TiO