Characteristics of Acid Gas and Acid Aerosol Emissions from Trichlorosilane Burning Processes under Various Humidity Conditions

Jhy-Charm Soo, Perng-Jy Tsai, Siou-Rong Li, Jenq-Renn Chen, W.J. Lee, Cheng-Ping Chang, Yu-Fang Ho

Research output: Contribution to conference › Presentation

Abstract

Presentation given at the The American Industrial Hygiene Conference and Expo 2011 (AIHce).

Original language	American English
State	Published - May 2011
Event	The American Industrial Hygiene Conference and Expo 2011 (AIHce) - Portland, US Duration: May 1 2011 → …

Conference	The American Industrial Hygiene Conference and Expo 2011 (AIHce)
Period	05/1/11 → …

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title = "Characteristics of Acid Gas and Acid Aerosol Emissions from Trichlorosilane Burning Processes under Various Humidity Conditions",

abstract = " Presentation given at the The American Industrial Hygiene Conference and Expo 2011 (AIHce).",

author = "Jhy-Charm Soo and Perng-Jy Tsai and Siou-Rong Li and Jenq-Renn Chen and W.J. Lee and Cheng-Ping Chang and Yu-Fang Ho",

year = "2011",

month = may,

language = "American English",

note = "The American Industrial Hygiene Conference and Expo 2011 (AIHce) ; Conference date: 01-05-2011",

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TY - CONF

T1 - Characteristics of Acid Gas and Acid Aerosol Emissions from Trichlorosilane Burning Processes under Various Humidity Conditions

AU - Soo, Jhy-Charm

AU - Tsai, Perng-Jy

AU - Li, Siou-Rong

AU - Chen, Jenq-Renn

AU - Lee, W.J.

AU - Chang, Cheng-Ping

AU - Ho, Yu-Fang

PY - 2011/5

Y1 - 2011/5

N2 - Presentation given at the The American Industrial Hygiene Conference and Expo 2011 (AIHce).

AB - Presentation given at the The American Industrial Hygiene Conference and Expo 2011 (AIHce).

M3 - Presentation

T2 - The American Industrial Hygiene Conference and Expo 2011 (AIHce)

Y2 - 1 May 2011

ER -