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Effect of thermal treatment on the band offsets and interfacial properties of HfOxNy gate dielectrics

  • M. Liu
  • , L. D. Zhang
  • , Q. Fang
  • , J. P. Zhang
  • , X. J. Wang
  • , G. He
  • CAS - Institute of Solid State Physics
  • Oxford Instruments plc, UK

Research output: Contribution to journalArticlepeer-review

11 Scopus citations

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