Effects of post-deposition annealing on the structure and optical properties of Y2O3 thin films

X. J. Wang; L. D. Zhang; J. P. Zhang; G. He; M. Liu; L. Q. Zhu

doi:10.1016/j.matlet.2008.07.003

Effects of post-deposition annealing on the structure and optical properties of Y₂O₃ thin films

X. J. Wang, L. D. Zhang, J. P. Zhang, G. He, M. Liu, L. Q. Zhu

Biochemistry, Chemistry, & Physics

CAS - Institute of Solid State Physics

Research output: Contribution to journal › Article › peer-review

53 Scopus citations

Abstract

Y₂O₃ thin film waveguides were prepared by RF magnetron sputtering. The effects of post-deposition annealing on the structure and optical properties have been investigated. The structural evolution of Y₂O₃ films with annealing temperature was investigated by X-ray diffraction (XRD). Spectroscopic ellipsometry was employed to determine the optical properties of Y₂O₃ films annealed at various temperatures. It was found that with increasing annealing temperature, the refractive index (n) of Y₂O₃ films increases. The optical band gap of Y₂O₃ films shifts to higher energy after higher temperature annealing, which is likely due to the reduction of defects and the change of crystalline structure in Y₂O₃ films.

Original language	English
Pages (from-to)	4235-4237
Number of pages	3
Journal	Materials Letters
Volume	62
Issue number	26
DOIs	https://doi.org/10.1016/j.matlet.2008.07.003
State	Published - Oct 15 2008

Keywords

Optical properties
Post-deposition annealing
Spectroscopic ellipsometry
YO films

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10.1016/j.matlet.2008.07.003

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title = "Effects of post-deposition annealing on the structure and optical properties of Y2O3 thin films",

abstract = "Y2O3 thin film waveguides were prepared by RF magnetron sputtering. The effects of post-deposition annealing on the structure and optical properties have been investigated. The structural evolution of Y2O3 films with annealing temperature was investigated by X-ray diffraction (XRD). Spectroscopic ellipsometry was employed to determine the optical properties of Y2O3 films annealed at various temperatures. It was found that with increasing annealing temperature, the refractive index (n) of Y2O3 films increases. The optical band gap of Y2O3 films shifts to higher energy after higher temperature annealing, which is likely due to the reduction of defects and the change of crystalline structure in Y2O3 films.",

keywords = "Optical properties, Post-deposition annealing, Spectroscopic ellipsometry, YO films",

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T1 - Effects of post-deposition annealing on the structure and optical properties of Y2O3 thin films

AU - Wang, X. J.

AU - Zhang, L. D.

AU - Zhang, J. P.

AU - He, G.

AU - Liu, M.

AU - Zhu, L. Q.

PY - 2008/10/15

Y1 - 2008/10/15

N2 - Y2O3 thin film waveguides were prepared by RF magnetron sputtering. The effects of post-deposition annealing on the structure and optical properties have been investigated. The structural evolution of Y2O3 films with annealing temperature was investigated by X-ray diffraction (XRD). Spectroscopic ellipsometry was employed to determine the optical properties of Y2O3 films annealed at various temperatures. It was found that with increasing annealing temperature, the refractive index (n) of Y2O3 films increases. The optical band gap of Y2O3 films shifts to higher energy after higher temperature annealing, which is likely due to the reduction of defects and the change of crystalline structure in Y2O3 films.

AB - Y2O3 thin film waveguides were prepared by RF magnetron sputtering. The effects of post-deposition annealing on the structure and optical properties have been investigated. The structural evolution of Y2O3 films with annealing temperature was investigated by X-ray diffraction (XRD). Spectroscopic ellipsometry was employed to determine the optical properties of Y2O3 films annealed at various temperatures. It was found that with increasing annealing temperature, the refractive index (n) of Y2O3 films increases. The optical band gap of Y2O3 films shifts to higher energy after higher temperature annealing, which is likely due to the reduction of defects and the change of crystalline structure in Y2O3 films.

KW - Optical properties

KW - Post-deposition annealing

KW - Spectroscopic ellipsometry

KW - YO films

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Effects of post-deposition annealing on the structure and optical properties of Y₂O₃ thin films

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Keywords

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