@inproceedings{8198dae1ab3a4eea8e22d92b874f04b0,
title = "Mapping the light emerging from nanoscale apertures",
abstract = "We present a method to physically map the light intensity transmitted through nanometer scale apertures. A metal film containing nanoapertures and supported on a glass substrate was coated with a negative tone photoresist, and the resist was exposed to UV radiation coming through the apertures from the opposite side. The resulting threedimensional features varied with aperture diameter and exposure time. This method provides direct visualization of the intensity distribution in close proximity to nanostructures and overcomes limitations imposed by physical probes where the contribution of the probe to the map requires deconvolution.",
keywords = "Nanolithography, Nanoscale apertures, Negative tone photoresist, Probeless imaging",
author = "Jacobson, {Stephen C.} and Rawlinson, {Nathan D.} and Dragos Amarie and Kovarik, {Michelle L.} and Schaich, {William L.} and Bogdan Dragnea",
year = "2005",
language = "English",
isbn = "0974361119",
series = "Micro Total Analysis Systems - Proceedings of MicroTAS 2005 Conference: 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences",
publisher = "Transducer Research Foundation",
pages = "742--744",
booktitle = "Micro Total Analysis Systems - Proceedings of MicroTAS 2005 Conference",
note = "9th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2005 ; Conference date: 09-10-2005 Through 13-10-2005",
}