Abstract
A-plane gallium nitride (GaN) layers were grown on γ-LiAlO 2 (3 0 2) by metalorganic chemical vapor deposition (MOCVD). The structural properties of the layers were characterized by high resolution X-ray diffraction (HRXRD). The structural and optical properties of a-plane GaN films are studied. The growth conditions with V/III ratios of 143 and 300 mbar may help produce a-GaN film with high quality and in a more isotropic shape. The polarization ratio of the near band emission of sample A (81.13%) was higher than sample B (54.65%), due to the improved crystallinity.
| Original language | English |
|---|---|
| Pages (from-to) | 483-487 |
| Number of pages | 5 |
| Journal | Journal of Crystal Growth |
| Volume | 318 |
| Issue number | 1 |
| DOIs | |
| State | Published - Mar 1 2011 |
Scopus Subject Areas
- Condensed Matter Physics
- Inorganic Chemistry
- Materials Chemistry
Keywords
- A1. High resolution X-ray diffraction
- A1. Scanning electron microscope
- A3. Metalorganic chemical vapor deposition
- B1. GaN
- B1. LiAlO