Silane Stability on Silicon Surfaces as Measured by Variable-Angle Spectroscopic Ellipsometry, AFM, and Contact Angle Measurements

S. D. Balderson, Delana A. Gajdosik-Nivens, W. B. Lacy, D. W. Conrad

Research output: Contribution to conferencePresentation

Original languageAmerican English
StatePublished - Aug 23 1998
Event216th ACS National Meeting - Boston, MA
Duration: Aug 23 1998 → …

Conference

Conference216th ACS National Meeting
Period08/23/98 → …

Keywords

  • Silane stability
  • Silicon surfaces
  • Measured
  • Variable-angle
  • Spectroscopic ellipsometry
  • AFM
  • Contact angle measurements

DC Disciplines

  • Biochemistry
  • Chemistry

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